Ultra clean semiconductor optical platform

分组	Hundred level high-precision air floating self balancing optical platform (DL-GJBQF1 series)Class 100 independent airbag non self balancing optical platform (DL-DLBQN series)Grade 100 rubber pad vibration isolation optical platform (DL-XJBPT series)
natural frequency	5Hz～7.5Hz1Hz~1.7Hz2Hz~3Hz
Vertical natural frequency	Empty load ：1-1.7Hz； full load： 0.8Hz/
Horizontal natural frequency	Empty load ：1.1-1.7Hz； full load ：1.0Hz/
Vibration isolation method	Air flotation vibration isolationRubber damping vibration isolation
inflation pressure	Maximum 0.6Mpa/
Horizontal adjustment method	Air flotation self balancingMechanical level adjustment